PillarHall® – Lateral High Aspect Ratio Test Structures

PillarHall® test chips enable easy, fast and accurate way to characterize thin film processes and to solve Ultra High Aspect Ratio nanometrology challenges. Typical use is thin film conformality measurements in atomic layer deposition and chemical vapor deposition processes.


Applications

Benefits


PillarHall ® Test Chips product sales are carried out by Chipmetrics Ltd. Country of origin is Finland.

Links

PillarHall – introduction in SlideShare

PillarHall – introduction in YouTube

Video: How to use PillarHall test chip


Contact us

Dr. Mikko Utriainen
Chipmetrics Ltd
Tel. +358 40 753 7415
mikko.utriainen(at)chipmetrics.com

info(at)chipmetrics.com


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