PillarHall® – accelerating thin film R&D

“What you can’t measure, you can’t improve.”

PillarHall® silicon wafers and chips enable easy analysis of thin film conformality using well-defined, record-demanding microscopic 3-D structures. Typical usage areas are atomic layer deposition and chemical vapor deposition R&D.

PillarHall introduction in SlideShare.

We are searching for test users, business collaborators and partners.


Applications

Benefits

NEWS

Meet us at conferences in 2017. Read more...


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Contact us

Dr. Mikko Utriainen
VTT Technical Research Centre of Finland Ltd
Tel. +358 40 753 7415
mikko.utriainen(at)vtt.fi

pillarhall(at)vtt.fi


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