PillarHall® – Lateral High Aspect Ratio Test Structures

PillarHall® test chips enable easy, fast and accurate way to characterize thin film processes and to solve Ultra High Aspect Ratio nanometrology challenges. Typical use is thin film conformality measurements in atomic layer deposition and chemical vapor deposition processes.


Applications

Benefits


PillarHall® Test Chips are fabricated and made available by VTT Technical Research Center of Finland Ltd, Micronova Nanofabrication Center

Links

PillarHall – introduction in SlideShare

PillarHall – introduction in YouTube

Video: How to use PillarHall test chip


Contact us

Dr. Mikko Utriainen
VTT Technical Research Centre of Finland Ltd
Tel. +358 40 753 7415
mikko.utriainen(at)vtt.fi

pillarhall(at)vtt.fi


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