PillarHall® – accelerating thin film R&D

“What you can’t measure, you can’t improve.”

PillarHall® Test Chips enable easy, fast and accurate way to characterize thin film processes in 3-D substrate. Typical use is conformality measurements in atomic layer deposition and chemical vapor deposition R&D.


Applications

Benefits


PillarHall® Test Chips are fabricated and made available by VTT Technical Research Center of Finland Ltd, Micronova Nanofabrication Center

Links

PillarHall – introduction in SlideShare

PillarHall – introduction in YouTube

Video: How to use PillarHall test chip


Contact us

Dr. Mikko Utriainen
VTT Technical Research Centre of Finland Ltd
Tel. +358 40 753 7415
mikko.utriainen(at)vtt.fi

pillarhall(at)vtt.fi


  #TestedWithPillarHall