Purpose of use: PillarHall® chip is a special test substrate for thin film deposition. PillarHall® test chip contains several lateral high aspect ratio (LHAR) microstructures. Lateral approach enables easy way to measure and quantify thin film conformality and other thin film characteristics in high aspect ratio structures.
Dr. Mikko Utriainen
VTT Technical Research Centre of Finland Ltd
Tel. +358 40 753 7415