DATA SHEET

PillarHall® Test Chip Data sheet (prototypes)

Purpose of use: PillarHall® chip is a special test substrate for thin film deposition. PillarHall® test chip contains several lateral high aspect ratio (LHAR) microstructures. Lateral approach enables easy way to measure and quantify thin film conformality and other thin film characteristics in high aspect ratio structures.

Delivery

Selected and inspected test chips. Delivery in vacuum release packages.

* DISCLAIMER: Prototype specifications are subject to change without notice, no warranty, contact for requests.

Contact us

Dr. Mikko Utriainen
VTT Technical Research Centre of Finland Ltd
Tel. +358 40 753 7415
mikko.utriainen(at)vtt.fi

pillarhall(at)vtt.fi


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